@inproceedings{a0ae0e0fff934eefa1b8a0700de94efb,
title = "A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy",
abstract = "This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3%.",
keywords = "dual-mode flow sensor, large flow range, readout IC",
author = "Mingzheng Duan and Wei Xu and Xiaopeng Zhong and Moaaz Ahmed and Lee, {Yi Kuen} and Amine Bermak",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 ; Conference date: 27-05-2018 Through 30-05-2018",
year = "2018",
month = apr,
day = "26",
doi = "10.1109/ISCAS.2018.8351324",
language = "English",
series = "Proceedings - IEEE International Symposium on Circuits and Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings",
address = "United States",
}