TY - GEN
T1 - A low-cost capacitive relative humidity sensor for food moisture monitoring application
AU - Wang, Bo
AU - Law, Man Kay
AU - Bermak, Amine
PY - 2012
Y1 - 2012
N2 - In this paper, a low-cost capacitive relative humidity hygrometer suitable for food moisture monitoring is presented. The variation of dielectric constant of polyimide film to relative humidity enables the sensor's functionality. A fully differential capacitance to digital converter is utilized as the hygrometer digital readout, which is immune to circuit wiring parasitic and enable the sensor's long-term stability. The humidity sensor is implemented using TSMC1P6M 0.18μm technology with thick top metal option. Simulation results indicate that an inaccuracy of +6/-5%RH can be achieved sensing from 10%RH ∼ 90%RH, with 5.4μW power consumption for sensing and 21.6mW power consumption for sensor heating.
AB - In this paper, a low-cost capacitive relative humidity hygrometer suitable for food moisture monitoring is presented. The variation of dielectric constant of polyimide film to relative humidity enables the sensor's functionality. A fully differential capacitance to digital converter is utilized as the hygrometer digital readout, which is immune to circuit wiring parasitic and enable the sensor's long-term stability. The humidity sensor is implemented using TSMC1P6M 0.18μm technology with thick top metal option. Simulation results indicate that an inaccuracy of +6/-5%RH can be achieved sensing from 10%RH ∼ 90%RH, with 5.4μW power consumption for sensing and 21.6mW power consumption for sensor heating.
UR - http://www.scopus.com/inward/record.url?scp=84869468385&partnerID=8YFLogxK
U2 - 10.1109/ACQED.2012.6320483
DO - 10.1109/ACQED.2012.6320483
M3 - Conference contribution
AN - SCOPUS:84869468385
SN - 9781467326889
T3 - Proceedings of the 4th Asia Symposium on Quality Electronic Design, ASQED 2012
SP - 95
EP - 99
BT - Proceedings of the 4th Asia Symposium on Quality Electronic Design, ASQED 2012
T2 - 4th Asia Symposium on Quality Electronic Design, ASQED 2012
Y2 - 10 July 2012 through 11 July 2012
ER -