@inproceedings{50854287506b488db02dbf45c53d31b6,
title = "A low-cost micro BTU sensor system fabricated by CMOS MEMS technology",
abstract = "An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6%. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.",
keywords = "CMOS MEMS, Micro BTU (μBTU) Sensor, RTD, TMCF Sensor",
author = "Wei Xu and Mingzheng Duan and Moaaz Ahmed and Saqib Mohamad and Amine Bermak and Lee, {Yi Kuen}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994073",
language = "English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "406--409",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}