DIRECT METAL NANO PATTERNING

Hicham Hamoudi (Inventor), Sara Iyad Mohd Saleh Ahmad (Inventor)

Research output: Patent

Abstract

Direct metal nano patterning is provided by constructing a carbon-based sheet that include self-assembled molecular monolayers (SAMs) of metals; and applying an electron beam to the carbon-based sheet to impart a pattern of metallic nano-particles in the carbon-based sheet.

Original languageEnglish
Patent numberUS2024014004
IPCH01J 37/ 317 A I
Priority date11/07/23
Publication statusPublished - 11 Jan 2024

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