Dynamic range enhancing technique for form, waviness and roughness measurements using fringe projection

Ayman Samara*, Faramarz Farahi, Angela Davies

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

Abstract

Optical techniques are used for non contact, high precision measurement tools. The most common optical technique is classical laser interferometry. Although laser interferometers offer high resolution, they suffer from limited dynamic range since the range is related to the wavelength of light. Other optical techniques like scanning white light interferometry and holography overcome this limitation. In this paper we propose a technique to enhance the vertical measurement range of a fringe projection system without reduction in its vertical resolution. It is based on the principle of inverse fringe projection, where the surface form is first measured by projecting a low frequency straight grating, and then used to create high frequency fringes with the proper inverse profile to project back on the surface and measure the surface finish without the impact of the form. The proposed technique is modeled, simulated and tested to measure the form, waviness and roughness of surfaces.

Original languageEnglish
Article number58790F
Pages (from-to)1-12
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5879
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventRecent Developments in Traceable Dimensional Measurements III - San Diego, CA, United States
Duration: 31 Jul 20051 Aug 2005

Keywords

  • Fringe projection
  • Interferometry
  • Optical instruments
  • Surface finish
  • Surface metrology

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