@inproceedings{c38c9234bf6e40eea3472454f3297da2,
title = "Dynamics of variable-geometry electrostatic microactuators",
abstract = "This paper investigates the dynamic behavior of a microbeam-based electrostatic microactuator. The cross-section of the microbeam under consideration varies along its length. A mathematical model, accounting for the system nonlinearities due to mid-plane stretching and electrostatic forcing, is adopted and used to examine the microbeam dynamics. The Differential Quadrature Method (DQM) and Finite Difference Method (FDM) are used to discretize the partial-differential-integral equation representing the microbeam dynamics. The resulting nonlinear algebraic system is solved for the limit cycles of various microstructure geometries under combined DC-AC loads and the stability of these limit cycles is examined using Floquet theory. Results are presented to show the effect of variations in the geometry on the frequency-response curves of the microactuator. We examine the effect of varying the gap size and the microbeam thickness and width on the frequency-response curves for hardening-type and softening-type behaviors. We found that it is possible to tune the geometry of the microactuator to eliminate dynamic pull-in.",
author = "F. Najar and S. Choura and Abdel-Rahman, {E. M.} and S. El-Borgi and Nayfeh, {A. H.}",
year = "2006",
doi = "10.1115/IMECE2006-14017",
language = "English",
isbn = "0791837904",
series = "American Society of Mechanical Engineers, Applied Mechanics Division, AMD",
publisher = "American Society of Mechanical Engineers (ASME)",
booktitle = "Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Applied Mechanics Division",
address = "United States",
note = "2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 ; Conference date: 05-11-2006 Through 10-11-2006",
}