Effective surface emissivity and heat dissipation among integrated bamboo-like super-black vertical carbon nanotube array electrodes in silicon via holes

Recently, carbon nanotube (CNT)-based micro-devices have attracted extensive attention at the frontiers of intelligent electronics, but the practical application of these devices are seriously limited by the low CNT package rates, poor heat dissipation, and intricate in-situ growth processes. Here, microelectrodes with low impedance based on in-situ-grown super-black vertical bamboo-like multi-walled CNT arrays (∼70 μm) were fabricated inside silicon via holes using face-down catalytic plasma enhanced chemical vapor deposition. Interestingly, the unique CNT array exhibited uniformly high absorption efficiency with a broad range of wavelength (exceeding 99.65% in the UV-NIR band and 99% in the mid-infrared region). Moreover, the excellent cooling performance of CNT array microelectrodes based on in-situ-grown bamboo-like CNT arrays within silicon via holes was demonstrated. Our study highlights the benefits of CNT-based micro functional devices, which indicates the integrated in-situ-grown bamboo-like CNT arrays will have potential applications in advanced microelectrodes, CNT-based field-effect transistors, and portable terahertz inspection devices.