Abstract
In this article, we present numerically and experimentally a tunable phononic membrane as an efficient temperature sensor based on the generation of slow modes (sharp resonance modes) in microcavities. The Phononic membrane is periodically perforated with subwavelength slits (apertures) to produce tunable modes in these cavities (mode corresponding to a cavity resonance). By emerging the silicon membrane in water, a coupling effect between acoustic waves through the slits occurs, which leads to multiple-wave interferences like Fabry Perot resonators. Besides, this design could secure the phenomenon of ultrasonic opacity through the perforated silicon membrane. Where a deep and large attenuation band with a relative bandwidth of 31 % and at the central frequency of 0.9 MHz is observed in the amplitude transmission spectra of the phononic membrane. Secondly, by modifying the temperature of the water, the position of the bandwidth is tuned, since, we could achieve high sensitivity of 2400 Hz °C-1 for a temperature change of 10–20 °C, which is considered a promising result for many important applications such as temperature sensors and biosensors.
Original language | English |
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Article number | 109763 |
Journal | Mechanical Systems and Signal Processing |
Volume | 185 |
DOIs | |
Publication status | Published - 15 Feb 2023 |
Externally published | Yes |
Keywords
- Fabry-Perrot resonator
- Fano resonances
- Q factor
- Resonant frequency
- Sensitivity
- Temperature sensor
- Tunable Phononic crystal