Fabrication of force sensors based on two-dimensional photonic crystal technology

T. Stomeo, M. Grande, A. Qualtieri, A. Passaseo, A. Salhi, M. De Vittorio*, D. Biallo, A. D'orazio, M. De Sario, V. Marrocco, V. Petruzzelli, F. Prudenzano

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

61 Citations (Scopus)

Abstract

We propose the simulation and the fabrication of a photonic crystal (PhC) strain-sensitive structure, showing that the optical properties of photonic crystals can be used to realize sensing devices characterized by a high degree of compactness and good resolution. The force/pressure optical sensor has been realized by designing a bulk GaAs/AlGaAs photonic crystal microcavity operating in the wavelength range 1300-1400 nm. The simulations show that the resonant wavelength of the mode localized in the microcavity shifts its spectral position following a linear behaviour when a pressure ranging between 0.25 Gpa and 5 GPa is applied, thus allowing the possibility to achieve pressure resolution of 5.82 nm/GPa. High-resolution electron beam lithography technique followed by inductively coupled plasma process were used to transfer the designed geometry on the sample.

Original languageEnglish
Pages (from-to)1450-1453
Number of pages4
JournalMicroelectronic Engineering
Volume84
Issue number5-8
DOIs
Publication statusPublished - May 2007
Externally publishedYes

Keywords

  • FDTD method
  • Microcavity
  • Photonic crystal
  • Sensors

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