Abstract
We propose the simulation and the fabrication of a photonic crystal (PhC) strain-sensitive structure, showing that the optical properties of photonic crystals can be used to realize sensing devices characterized by a high degree of compactness and good resolution. The force/pressure optical sensor has been realized by designing a bulk GaAs/AlGaAs photonic crystal microcavity operating in the wavelength range 1300-1400 nm. The simulations show that the resonant wavelength of the mode localized in the microcavity shifts its spectral position following a linear behaviour when a pressure ranging between 0.25 Gpa and 5 GPa is applied, thus allowing the possibility to achieve pressure resolution of 5.82 nm/GPa. High-resolution electron beam lithography technique followed by inductively coupled plasma process were used to transfer the designed geometry on the sample.
Original language | English |
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Pages (from-to) | 1450-1453 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 84 |
Issue number | 5-8 |
DOIs | |
Publication status | Published - May 2007 |
Externally published | Yes |
Keywords
- FDTD method
- Microcavity
- Photonic crystal
- Sensors