Abstract
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous integration is achieved by combining the two wafers via the proprietary InvenSense AlN process. The measured sensitivity of our CMOS MEMS flow sensor is 98 mV/sccm which is three times better than the state-of-the-art counterpart. The flow range measured by our SoC is from-26 to 26 m/s (from-50 to 50 sccm). Moreover, the pulsed heater operation makes this proposed SoC flow sensor a very low power (<9 mW) and, thus, a promising candidate for the Internet-of-Things applications in smart home/green buildings.
Original language | English |
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Article number | 8607070 |
Pages (from-to) | 3415-3424 |
Number of pages | 10 |
Journal | IEEE Sensors Journal |
Volume | 19 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1 May 2019 |
Externally published | Yes |
Keywords
- CMOS MEMS flow sensor
- Wheatstone bridge
- instrumentation amplifiers
- readout integrated circuit