@inproceedings{46bc0113a9ee4897b9945181c91c01f5,
title = "High performance high density gas-FET array in standard CMOS",
abstract = "New gas sensitive FET (Gas-FET) structures are proposed to enable standard CMOS fabrication of high performance high density gas sensor arrays that are fully integrated with their associated circuitry. The performance of the proposed Gas-FET structures was investigated by fabricating an 8×8 Gas-FET array comprising 45μm×46μm sensing elements. Room temperature sub-ppm acetone sensing capability is demonstrated for non-invasive diabetes diagnosis through exhaled human breath. Performance comparison shows that the fabricated array boasts superior sensitivity while enabling ultra-low power operation at room temperature, with over 3 orders magnitude reduction in power consumption compared to previously reported standard CMOS resistive gas sensors.",
author = "Qian Yu and Xiaopeng Zhong and Farid Boussaid and Amine Bermak and Cy Tsui",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 38th IEEE Symposium on VLSI Technology, VLSI Technology 2018 ; Conference date: 18-06-2018 Through 22-06-2018",
year = "2018",
month = oct,
day = "25",
doi = "10.1109/VLSIT.2018.8510700",
language = "English",
series = "Digest of Technical Papers - Symposium on VLSI Technology",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "39--40",
booktitle = "2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018",
address = "United States",
}