Abstract
In this contribution we show the fabrication of functional hybrid organic-semiconductor microtubes obtained by combining the self-rolling of In0.2Ga0.8As/GaAs layers with the deposition of polymer multilayers obtained by Layer-by-Layer (LbL) self-assembly. It was demonstrated that the polymer multilayers are compatible with the selective etching exploited for the channel formation and that reactivity to an external stimulus (e.g. pH) is maintained after the hybrid structure formation.
Original language | English |
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Pages (from-to) | 1170-1172 |
Number of pages | 3 |
Journal | Microelectronic Engineering |
Volume | 85 |
Issue number | 5-6 |
DOIs | |
Publication status | Published - May 2008 |
Externally published | Yes |
Keywords
- LbL polymer films
- Organic-semiconductor microtubes
- Strained multilayer