@inproceedings{9d01ea4f9ffd4a0896f1db2d2c85c769,
title = "Impact of the Oxygen Flow during the Magnetron Sputtering Deposition on the Indium Tin Oxide thin films for Silicon Heterojunction Solar Cell",
abstract = "We report on the optoelectronic properties of ITO layers deposited by DC sputtering, using different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 1% to 8%], for silicon heterojunction (SHJ) solar cell application. The depth profiling of the various elements throughout the thicknesses and interfaces of the ITOs and thin films forming the SHJ device was determined by time-of-flight secondary ion mass spectrometry. Finally, the photovoltaic performance of the fabricated SHJ cells was evaluated with respect to the r(O2) into the ITO layers. Lower r(O2) was found to yield the best PV performance which is attributed to lower parasitic resistive losses.",
keywords = "Indium Tin Oxide, Magnetron sputtering, Silicon Heterojunction, ToF-SIMS",
author = "Brahim Aissa and Yahya Zakaria and Abdallah, {Amir A.} and Kivambe, {Maulid M.} and Ayman Samara and Shetty, {Akshath Raghu} and Jean Cattin and Jan Haschke and Mathieu Boccard and Christophe Ballif",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 46th IEEE Photovoltaic Specialists Conference, PVSC 2019 ; Conference date: 16-06-2019 Through 21-06-2019",
year = "2019",
month = jun,
doi = "10.1109/PVSC40753.2019.8980906",
language = "English",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2659--2666",
booktitle = "2019 IEEE 46th Photovoltaic Specialists Conference, PVSC 2019",
address = "United States",
}