Laser beam lithography of metal oxide electrodes for PZT memory applications

Jarrod L. Norton; Said A. Mansour; G. L. Liedl; Arden L. Bement; Elliott B. Slamovich; C. Venkatraman

doi:10.1557/proc-380-99

Laser beam lithography of metal oxide electrodes for PZT memory applications

Jarrod L. Norton^*, Said A. Mansour, G. L. Liedl, Arden L. Bement, Elliott B. Slamovich, C. Venkatraman

^*Corresponding author for this work

Purdue University

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(Zr_xTi_1x)O₃ (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO₂ and (La,Sr)CoO₃ electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm² at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO₂ and 59 mΩ-cm for LSCO.

Original language	English
Pages (from-to)	99-104
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	380
DOIs	https://doi.org/10.1557/proc-380-99
Publication status	Published - 1995
Externally published	Yes
Event	Proceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA Duration: 17 Apr 1995 → 20 Apr 1995

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@article{42b18c9dc05846a6aec059ebbf678018,

title = "Laser beam lithography of metal oxide electrodes for PZT memory applications",

abstract = "Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(ZrxTi1x)O3 (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO2 and (La,Sr)CoO3 electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm2 at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO2 and 59 mΩ-cm for LSCO.",

author = "Norton, {Jarrod L.} and Mansour, {Said A.} and Liedl, {G. L.} and Bement, {Arden L.} and Slamovich, {Elliott B.} and C. Venkatraman",

year = "1995",

doi = "10.1557/proc-380-99",

language = "English",

volume = "380",

pages = "99--104",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1995 MRS Spring Meeting ; Conference date: 17-04-1995 Through 20-04-1995",

}

TY - JOUR

T1 - Laser beam lithography of metal oxide electrodes for PZT memory applications

AU - Norton, Jarrod L.

AU - Mansour, Said A.

AU - Liedl, G. L.

AU - Bement, Arden L.

AU - Slamovich, Elliott B.

AU - Venkatraman, C.

PY - 1995

Y1 - 1995

N2 - Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(ZrxTi1x)O3 (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO2 and (La,Sr)CoO3 electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm2 at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO2 and 59 mΩ-cm for LSCO.

AB - Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(ZrxTi1x)O3 (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO2 and (La,Sr)CoO3 electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm2 at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO2 and 59 mΩ-cm for LSCO.

UR - http://www.scopus.com/inward/record.url?scp=0029507904&partnerID=8YFLogxK

U2 - 10.1557/proc-380-99

DO - 10.1557/proc-380-99

M3 - Conference article

AN - SCOPUS:0029507904

SN - 0272-9172

VL - 380

SP - 99

EP - 104

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1995 MRS Spring Meeting

Y2 - 17 April 1995 through 20 April 1995

ER -

Laser beam lithography of metal oxide electrodes for PZT memory applications

Abstract

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