@inproceedings{d0532980554544a4aa15aa5251ae79ec,
title = "Mapping acoustic field distributions of VHF to SHF SAW transducers using a scanning electron microscope",
abstract = "Mapping the energy distribution of Surface Acoustic Wave (SAW) devices operating in the Very High Frequency (VHF) and Super-High Frequency (SHF) range provides a quantitative indicator of energy confinement, a core parameter when addressing low loss filters or high quality factor resonators. We here demonstrate the use of Scanning Electron Microscopy (SEM) for mapping Rayleigh wave acoustic field and shear transverse wave (STW) propagating on quartz. Furthermore, the availability of Focused Ion Beam (FIB) for milling the piezoelectric substrate allows for creating obstacles on the acoustic path and hence tune the acoustic wave propagation direction by reflecting the waves along directions which might otherwise exhibit poor electromechanical coupling.",
author = "A. Godet and Friedt, {J. M.} and S. Demb{\'e}l{\'e} and N. Piat and A. Khelif and P. Vairac and J. Agnus and Bourgeois, {P. Y.} and G. Goavec-M{\'e}rou",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 30th European Frequency and Time Forum, EFTF 2016 ; Conference date: 04-04-2016 Through 07-04-2016",
year = "2016",
month = may,
day = "23",
doi = "10.1109/EFTF.2016.7477802",
language = "English",
series = "2016 European Frequency and Time Forum, EFTF 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 European Frequency and Time Forum, EFTF 2016",
address = "United States",
}