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Abstract
MEMS technology is widely used for biological applications as a reliable alternative for optical systems. ThinFilm Bulk Acoustic Resonator (FBAR) has been proposed as key device in gravimetric sensing, thanks to the GHz operating frequency with high-quality factor and high sensitivity. However, using FBAR in biosensing is difficult due to the presence of the biological liquid resulting in an increase of the acoustic radiation hence strongly deteriorating the device performance. This paper proposes the integration of phononic nano pillar in the FBAR leading to the so-called innovative P-FBAR device structure. P-FBAR enables the reduction of energy losses and hence preserving the energy at the surface of the device. The paper provides clear evidence of the presence of nano-resonators storing mechanical energy and offering new features including a strongly confined spatial distribution of energy. As a result, an improved quality factor and mass-sensitivity is obtained in the proposed P-FBAR device. The optimum design and performance of the proposed P-FBAR is numerically analyzed through finite element method simulations. The proposed P-FBAR offers an order of magnitude improvement in mass sensitivity and an order of magnitude improvement in quality factor leading to two orders of magnitude enhancement in the Figure of merit compared to the conventional FBAR. The proposed design enables a better in-situ bio detection at lower cost and higher resolution.
Original language | English |
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Title of host publication | 2022 International Conference on Microelectronics, ICM 2022 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 246-249 |
Number of pages | 4 |
ISBN (Electronic) | 9781665493246 |
DOIs | |
Publication status | Published - 2022 |
Event | 2022 International Conference on Microelectronics, ICM 2022 - Virtual, Online, Morocco Duration: 4 Dec 2022 → 7 Dec 2022 |
Publication series
Name | 2022 International Conference on Microelectronics, ICM 2022 |
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Conference
Conference | 2022 International Conference on Microelectronics, ICM 2022 |
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Country/Territory | Morocco |
City | Virtual, Online |
Period | 4/12/22 → 7/12/22 |
Keywords
- Acoustic Resonators
- Biosensors
- Film Bulk Resonator
- Gravimetric Detection
- Phononic Crystal
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Dive into the research topics of 'Phononic Film Bulk Acoustic Resonator for High mass-sensitive Biosensing'. Together they form a unique fingerprint.Projects
- 1 Finished
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EX-QNRF-NPRPS-13: Artificial Intelligence Assisted and Computationally Efficient Smart Vision Sensor
Bermak, A. (Lead Principal Investigator), Bouzerdoum, A. (Principal Investigator), Akbar, M. A. G. (Post Doctoral Fellow) & Abubakar, A. (Graduate Student)
19/04/21 → 19/10/24
Project: Applied Research