TY - JOUR
T1 - Programmable Nanoarchitectonics of Pore Array for Electronic-Nose-Based Early Disease Diagnose
AU - Pan, Xiaofang
AU - Zhao, Xiaojin
AU - Xu, Wei
AU - Fan, Zhiyong
AU - Bermak, Amine
N1 - Publisher Copyright:
© 2022 Institute of Electrical and Electronics Engineers Inc.. All rights reserved.
PY - 2022/8/1
Y1 - 2022/8/1
N2 - — In this article, we present a novel electronic nose fabrication process based on highly programmable anodic aluminum oxide (AAO) nanoarchitectonics and ultrasonic spray pyrolysis (USP) deposition. Featuring an ultralow manufacturing cost, the deposited material’s morphology can be accurately controlled with fabricated general-purpose AAO template. Compared with nonstandard lithography-based template fabrication method, the need of complicated Bosch etching process and its associated complex process parameter tuning is eliminated. As a result, the cost-effective mass production of 3-D nanotemplate-based material and devices can be enabled. In addition, the target material’s limited coverage and time efficiency issues widely existing in the previous deposition methods are well-addressed by our customized USP deposition, especially for the 3-D nanotemplate with large surface-to-volume ratio, leading to significantly improved gas-sensing performance. Moreover, the proposed fabrication recipe, together with the adopted gas recognition algorithms based on linear discriminant analysis (LDA), is validated based on the reported extensive measurement results for five gas biomarkers widely exploited for patients’ exhaled gas-sensing and recognition applications. This shows great potential for the early disease diagnose of diabetes, breast cancer, acute lung injury, colon diseases, lung cancer, and so on.
AB - — In this article, we present a novel electronic nose fabrication process based on highly programmable anodic aluminum oxide (AAO) nanoarchitectonics and ultrasonic spray pyrolysis (USP) deposition. Featuring an ultralow manufacturing cost, the deposited material’s morphology can be accurately controlled with fabricated general-purpose AAO template. Compared with nonstandard lithography-based template fabrication method, the need of complicated Bosch etching process and its associated complex process parameter tuning is eliminated. As a result, the cost-effective mass production of 3-D nanotemplate-based material and devices can be enabled. In addition, the target material’s limited coverage and time efficiency issues widely existing in the previous deposition methods are well-addressed by our customized USP deposition, especially for the 3-D nanotemplate with large surface-to-volume ratio, leading to significantly improved gas-sensing performance. Moreover, the proposed fabrication recipe, together with the adopted gas recognition algorithms based on linear discriminant analysis (LDA), is validated based on the reported extensive measurement results for five gas biomarkers widely exploited for patients’ exhaled gas-sensing and recognition applications. This shows great potential for the early disease diagnose of diabetes, breast cancer, acute lung injury, colon diseases, lung cancer, and so on.
KW - Disease diagnose
KW - high-aspect-ratio material deposition
KW - machine learning classification algorithm
KW - programmable template fabrication
KW - sensor synthesis
UR - http://www.scopus.com/inward/record.url?scp=85132788141&partnerID=8YFLogxK
U2 - 10.1109/TED.2022.3178364
DO - 10.1109/TED.2022.3178364
M3 - Article
AN - SCOPUS:85132788141
SN - 0018-9383
VL - 69
SP - 4514
EP - 4520
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 8
ER -