Silicon phononic crystal for surface acoustic waves

Sarah Benchabane*, Abdelkrim Khelif, William Daniau, Laurent Robert, Valérie Pétrini, Badreddine Assouart, Brice Vincent, Omar Elmazriat, Jan Krüger, Vincent Laude

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

The recent theoretical and experimental demonstrations of band gaps for surface acoustic waves have still enlarged the field of potential applications for phononic crystals. Direct excitation of this type of waves on the surface of a piezoelectric material, and their already extensive use in ultrasonics make them an interesting basis for phononic crystal based, acoustic signal processing devices. Thus is raised the issue of designing suitable structures for a given application. An ongoing study of the key parameters affecting the position and width of band gaps in phononic crystal is hence presented in this paper. In particular, closer interest is given to both the lattice structure and its filling fraction. Numerical examples are then given in the case of vacuum scatterers/solid matrix crystals. Eventually, a fabrication method of a silicon phononic crystal is presented, and characterization methods are proposed.

Original languageEnglish
Title of host publication2005 IEEE Ultrasonics Symposium
Pages922-925
Number of pages4
DOIs
Publication statusPublished - 2005
Externally publishedYes
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 18 Sept 200521 Sept 2005

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume2
ISSN (Print)1051-0117

Conference

Conference2005 IEEE Ultrasonics Symposium
Country/TerritoryNetherlands
CityRotterdam
Period18/09/0521/09/05

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