TY - GEN
T1 - System-Level Modeling and Design of a Temperature Compensated CMOS MEMS Thermal Flow Sensor
AU - Li, Zhijuan
AU - Fang, Zetao
AU - Wang, Bo
AU - Ahmed, Moaaz
AU - Pan, Xiaofang
AU - Han, Su Ting
AU - Zhao, Xiaojin
AU - Xu, Wei
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - In this paper, we present a system-level model for an ambient temperature-compensated CMOS MEMS Thermal Flow (C2 MTF) sensor. The system-level model is first validated by a computational fluid dynamics (CFD) model and is further used for a fully coupled simulation between the microstructure, heat transfer, and interface circuits. Correspondingly, a monolithically integrated C2 MTF sensor is designed and optimized using a 0.18 μm 1P6M CMOS MEMS technology. The designed System on Chip (SoC) C2 MTF sensor has a flow range of-1010 m/s, and its highest sensitivity is 0.274 V/(m/s) with a system power consumption of less than 3.6 mW. In comparison with the more than 50% output drift for the uncompensated counterpart, the output drift of the designed C2 MTF sensor is reduced to 7% under an ambient temperature of 050 °C. In addition, based on the proposed system-level model, the additional optimizations show that the output drift can be greatly reduced to 0.5%, by arranging another on-chip overheated temperature-regulating resistor Rc in the future, delicately.
AB - In this paper, we present a system-level model for an ambient temperature-compensated CMOS MEMS Thermal Flow (C2 MTF) sensor. The system-level model is first validated by a computational fluid dynamics (CFD) model and is further used for a fully coupled simulation between the microstructure, heat transfer, and interface circuits. Correspondingly, a monolithically integrated C2 MTF sensor is designed and optimized using a 0.18 μm 1P6M CMOS MEMS technology. The designed System on Chip (SoC) C2 MTF sensor has a flow range of-1010 m/s, and its highest sensitivity is 0.274 V/(m/s) with a system power consumption of less than 3.6 mW. In comparison with the more than 50% output drift for the uncompensated counterpart, the output drift of the designed C2 MTF sensor is reduced to 7% under an ambient temperature of 050 °C. In addition, based on the proposed system-level model, the additional optimizations show that the output drift can be greatly reduced to 0.5%, by arranging another on-chip overheated temperature-regulating resistor Rc in the future, delicately.
KW - CMOS MEMS thermal flow sensor
KW - SoC
KW - monolithic integration
KW - system-level model
KW - temperature compensation
UR - http://www.scopus.com/inward/record.url?scp=85142511946&partnerID=8YFLogxK
U2 - 10.1109/ISCAS48785.2022.9937487
DO - 10.1109/ISCAS48785.2022.9937487
M3 - Conference contribution
AN - SCOPUS:85142511946
T3 - Proceedings - IEEE International Symposium on Circuits and Systems
SP - 2072
EP - 2076
BT - IEEE International Symposium on Circuits and Systems, ISCAS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 IEEE International Symposium on Circuits and Systems, ISCAS 2022
Y2 - 27 May 2022 through 1 June 2022
ER -