TY - GEN
T1 - Theoretical and numerical modeling of a CMOS micromachined acoustic sensor
AU - Mezghani, B.
AU - Haboura, K.
AU - Tounsi, F.
AU - Smaoui, S.
AU - El-Borgi, S.
AU - Choura, S.
AU - Masmoudi, M.
PY - 2006
Y1 - 2006
N2 - In this paper, we present theoretical and numerical modeling done on a new structure of CMOS micromachined inductive microphone. Its mode of operation is based on the variation of the mutual inductance between an external fixed inductor and an internal suspended inductor. This internal inductor is designed on a 1.4×1.4mm2 suspended membrane. The displacement of the suspended membrane with two different attachment structures, the I-shaped and the L-shaped beams, is studied. Using a theoretical mechanical modeling, we get displacement values of 13.11μm and 68.82 μm, for the Ishaped and L-shaped beam design, respectively. With a numerical FEM analysis, using the Ansys software, displacement values of 12.7μm and 63.5 μm were found for the I-shaped and L-shaped beam design, respectively. Using the analogy between acoustic, mechanical and electrical domains, the dynamic behavior of the L-shaped beam design sensor is studied and a corner frequency around 200 kHz is found. This value is also found when applying analytical dynamics principles to determine the equations of motion for the suspended membrane. A FEM analysis, using the Ansys software, is conducted in order to validate this theoretical model.
AB - In this paper, we present theoretical and numerical modeling done on a new structure of CMOS micromachined inductive microphone. Its mode of operation is based on the variation of the mutual inductance between an external fixed inductor and an internal suspended inductor. This internal inductor is designed on a 1.4×1.4mm2 suspended membrane. The displacement of the suspended membrane with two different attachment structures, the I-shaped and the L-shaped beams, is studied. Using a theoretical mechanical modeling, we get displacement values of 13.11μm and 68.82 μm, for the Ishaped and L-shaped beam design, respectively. With a numerical FEM analysis, using the Ansys software, displacement values of 12.7μm and 63.5 μm were found for the I-shaped and L-shaped beam design, respectively. Using the analogy between acoustic, mechanical and electrical domains, the dynamic behavior of the L-shaped beam design sensor is studied and a corner frequency around 200 kHz is found. This value is also found when applying analytical dynamics principles to determine the equations of motion for the suspended membrane. A FEM analysis, using the Ansys software, is conducted in order to validate this theoretical model.
KW - Acoustic sensor
KW - CMOS
KW - Micromachined
KW - Numerical modeling
KW - Suspended membrane
UR - http://www.scopus.com/inward/record.url?scp=78650346581&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:78650346581
SN - 0780397266
SN - 9780780397262
T3 - Proceedings - 2006 International Conference on Design and Test of Integrated Systems in Nanoscale Technology, IEEE DTIS 2006
SP - 419
EP - 423
BT - Proceedings - 2006 International Conference on Design and Test of Integrated Systems in Nanoscale Technology, IEEE DTIS 2006
T2 - 2006 International Conference on Design and Test of Integrated Systems in Nanoscale Technology, IEEE DTIS 2006
Y2 - 5 September 2006 through 7 September 2006
ER -