Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning

P. A. Deymier*, A. Khelif, B. Djafari-Rouhani, J. O. Vasseur, S. Raghavan

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning'. Together they form a unique fingerprint.

Keyphrases

Material Science

Physics

Earth and Planetary Sciences

Engineering