Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition

Brahim Aissa; Atef Zekri; Yahya Zakaria; Ayman Samara; Cedric Broussillou

doi:10.1109/PVSC43889.2021.9518553

Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition

Brahim Aissa, Atef Zekri, Yahya Zakaria, Ayman Samara, Cedric Broussillou

Hamad bin Khalifa University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We report on the optoelectronic and structural properties of MoO3-x thin layers deposited by reactive DC magnetron sputtering, of a pure Mo target under different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 0.25% to 16%]. Structural, morphological, optical and electronic transport analyses were systematically carried out on the deposited films. Transmission electron analysis showed that the films are compact and amorphous for low r(O2) and porous and crystalline for high O-content (i.e. 8 and 16 %). The associated hole mobilities were found to vary by almost two orders of magnitudes with respect to r(O2), and reached the very high value of 20 cm2/Vs for 0.08 of oxygen. Correlations between optical transmittance/absorbance, oxidation states, different refractive indexes and the oxygen content are also presented and discussed.

Original language	English
Title of host publication	2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	68-70
Number of pages	3
ISBN (Electronic)	9781665419222
DOIs	https://doi.org/10.1109/PVSC43889.2021.9518553
Publication status	Published - 20 Jun 2021
Event	48th IEEE Photovoltaic Specialists Conference, PVSC 2021 - Fort Lauderdale, United States Duration: 20 Jun 2021 → 25 Jun 2021

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Conference

Conference	48th IEEE Photovoltaic Specialists Conference, PVSC 2021
Country/Territory	United States
City	Fort Lauderdale
Period	20/06/21 → 25/06/21

Keywords

MoOx
Structural properties
optoelectronic
reactive sputtering

Access to Document

10.1109/PVSC43889.2021.9518553

Cite this

Aissa, B., Zekri, A., Zakaria, Y., Samara, A., & Broussillou, C. (2021). Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition. In 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021 (pp. 68-70). (Conference Record of the IEEE Photovoltaic Specialists Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC43889.2021.9518553

Aissa, Brahim ; Zekri, Atef ; Zakaria, Yahya et al. / Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition. 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 68-70 (Conference Record of the IEEE Photovoltaic Specialists Conference).

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title = "Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition",

abstract = "We report on the optoelectronic and structural properties of MoO3-x thin layers deposited by reactive DC magnetron sputtering, of a pure Mo target under different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 0.25% to 16%]. Structural, morphological, optical and electronic transport analyses were systematically carried out on the deposited films. Transmission electron analysis showed that the films are compact and amorphous for low r(O2) and porous and crystalline for high O-content (i.e. 8 and 16 %). The associated hole mobilities were found to vary by almost two orders of magnitudes with respect to r(O2), and reached the very high value of 20 cm2/Vs for 0.08 of oxygen. Correlations between optical transmittance/absorbance, oxidation states, different refractive indexes and the oxygen content are also presented and discussed.",

keywords = "MoOx, Structural properties, optoelectronic, reactive sputtering",

author = "Brahim Aissa and Atef Zekri and Yahya Zakaria and Ayman Samara and Cedric Broussillou",

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Aissa, B , Zekri, A, Zakaria, Y, Samara, A & Broussillou, C 2021, Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition. in 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Conference Record of the IEEE Photovoltaic Specialists Conference, Institute of Electrical and Electronics Engineers Inc., pp. 68-70, 48th IEEE Photovoltaic Specialists Conference, PVSC 2021, Fort Lauderdale, United States, 20/06/21. https://doi.org/10.1109/PVSC43889.2021.9518553

Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition. / Aissa, Brahim ; Zekri, Atef; Zakaria, Yahya et al.
2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 68-70 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition

AU - Aissa, Brahim

AU - Zekri, Atef

AU - Zakaria, Yahya

AU - Samara, Ayman

AU - Broussillou, Cedric

PY - 2021/6/20

Y1 - 2021/6/20

N2 - We report on the optoelectronic and structural properties of MoO3-x thin layers deposited by reactive DC magnetron sputtering, of a pure Mo target under different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 0.25% to 16%]. Structural, morphological, optical and electronic transport analyses were systematically carried out on the deposited films. Transmission electron analysis showed that the films are compact and amorphous for low r(O2) and porous and crystalline for high O-content (i.e. 8 and 16 %). The associated hole mobilities were found to vary by almost two orders of magnitudes with respect to r(O2), and reached the very high value of 20 cm2/Vs for 0.08 of oxygen. Correlations between optical transmittance/absorbance, oxidation states, different refractive indexes and the oxygen content are also presented and discussed.

AB - We report on the optoelectronic and structural properties of MoO3-x thin layers deposited by reactive DC magnetron sputtering, of a pure Mo target under different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 0.25% to 16%]. Structural, morphological, optical and electronic transport analyses were systematically carried out on the deposited films. Transmission electron analysis showed that the films are compact and amorphous for low r(O2) and porous and crystalline for high O-content (i.e. 8 and 16 %). The associated hole mobilities were found to vary by almost two orders of magnitudes with respect to r(O2), and reached the very high value of 20 cm2/Vs for 0.08 of oxygen. Correlations between optical transmittance/absorbance, oxidation states, different refractive indexes and the oxygen content are also presented and discussed.

KW - MoOx

KW - Structural properties

KW - optoelectronic

KW - reactive sputtering

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U2 - 10.1109/PVSC43889.2021.9518553

DO - 10.1109/PVSC43889.2021.9518553

M3 - Conference contribution

AN - SCOPUS:85115965272

T3 - Conference Record of the IEEE Photovoltaic Specialists Conference

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EP - 70

BT - 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 48th IEEE Photovoltaic Specialists Conference, PVSC 2021

Y2 - 20 June 2021 through 25 June 2021

ER -

Aissa B , Zekri A, Zakaria Y, Samara A, Broussillou C. Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition. In 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 68-70. (Conference Record of the IEEE Photovoltaic Specialists Conference). doi: 10.1109/PVSC43889.2021.9518553

Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

EX-QNRF-NPRPS-36: Light Management in Solar Cells using Fault-Tolerant Plasmonics and Metamaterials [MetaSol]

Cite this

Tuning the Structural and Optoelectronic Properties of Sub-stoichiometric Molybdenum Trioxide (MoOx, x < 3) Thin Films through the Oxygen Flow during the Reactive Magnetron Sputtering Deposition

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Projects

EX-QNRF-NPRPS-36: Light Management in Solar Cells using Fault-Tolerant Plasmonics and Metamaterials [MetaSol]

Cite this