Two-dimensional phononic crystal slab defect mode micromechanical resonators

Saeed Mohammadi; Ali A. Eftekhar; Abdelkrim Khelif; William D. Hunt; Ali Adibia

doi:10.1117/12.816990

Two-dimensional phononic crystal slab defect mode micromechanical resonators

Saeed Mohammadi^*, Ali A. Eftekhar, Abdelkrim Khelif, William D. Hunt, Ali Adibia

^*Corresponding author for this work

Georgia Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentarymetal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.

Original language	English
Article number	72230H
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7223
DOIs	https://doi.org/10.1117/12.816990
Publication status	Published - 2009
Externally published	Yes
Event	Photonic and Phononic Crystal Materials and Devices IX - San Jose, CA, United States Duration: 27 Jan 2009 → 29 Jan 2009

Keywords

Micro-electro-mechanical systems
Phononic crystal
Quality factor
Resonator

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10.1117/12.816990

Cite this

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title = "Two-dimensional phononic crystal slab defect mode micromechanical resonators",

abstract = "By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentarymetal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.",

keywords = "Micro-electro-mechanical systems, Phononic crystal, Quality factor, Resonator",

author = "Saeed Mohammadi and Eftekhar, {Ali A.} and Abdelkrim Khelif and Hunt, {William D.} and Ali Adibia",

year = "2009",

doi = "10.1117/12.816990",

language = "English",

volume = "7223",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Photonic and Phononic Crystal Materials and Devices IX ; Conference date: 27-01-2009 Through 29-01-2009",

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TY - JOUR

T1 - Two-dimensional phononic crystal slab defect mode micromechanical resonators

AU - Mohammadi, Saeed

AU - Eftekhar, Ali A.

AU - Khelif, Abdelkrim

AU - Hunt, William D.

AU - Adibia, Ali

PY - 2009

Y1 - 2009

N2 - By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentarymetal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.

AB - By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentarymetal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.

KW - Micro-electro-mechanical systems

KW - Phononic crystal

KW - Quality factor

KW - Resonator

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VL - 7223

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 72230H

T2 - Photonic and Phononic Crystal Materials and Devices IX

Y2 - 27 January 2009 through 29 January 2009

ER -

Two-dimensional phononic crystal slab defect mode micromechanical resonators

Abstract

Keywords

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