VHF phononic band gap band pass filters using coupled resonator acoustic waveguides (CRAW)

Saeed Mohammadi*, Abdelkrim Khelif, Ali Adibi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

Among the functionalities required in high quality wireless communication devices is filtering. The ability to filter a subset of frequencies with sharp transition bands is one of the most demanding functions that micromechanical structures have a sharp edge over other technologies in wireless communication devices. In this paper we report the design, fabrication, and characterization a CMOS-compatible VHF bad pass (BP) filter element based on the phononic band gap (PnBG) of a phononic crystal (PnC) structure fabricated in silicon (Si). To our knowledge this is the first demonstration of the possibility of PnC filtering reported at such high frequencies. By coupling PnC resonators, BP filters are realized to function within the PnBG of the PnC. The BP filter is centered approximately at 140 MHz with a rational bandwidth of 7% and very sharp transition region characteristics.

Original languageEnglish
Title of host publication2011 IEEE International Ultrasonics Symposium, IUS 2011
Pages2158-2160
Number of pages3
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
Duration: 18 Oct 201121 Oct 2011

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2011 IEEE International Ultrasonics Symposium, IUS 2011
Country/TerritoryUnited States
CityOrlando, FL
Period18/10/1121/10/11

Keywords

  • Micro/Nano-electro-mechanical systems (MEMS/NEMS)
  • Phononic crystals
  • demultiplexing
  • filtering
  • multiplexing
  • phononic band gaps
  • resonator
  • waveguide

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